反射式红外甲烷传感器气室设计  

Design on gas chamber of reflective infrared methane sensor

作　　者：刘岗[1,2] 梁庭[1,2] 郇弢[1,2] 雷程[1,2] 赵晓霞[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]电子测试技术国防科技重点实验室,山西太原030051

出　　处：《传感器与微系统》2013年第2期96-98,共3页Transducer and Microsystem Technologies

基　　金：国家"863"计划重大资助项目(2006AA040101)

摘　　要：设计给出一种稳定性好、灵敏度高的反射式红外甲烷传感器气室设计过程与测试结果。红外甲烷传感器基于色散型红外吸收光谱法的原理,利用非分光红外探测技术过滤甲烷气体的特征波长以外的光线,再采用双通道补偿技术对气室内部的甲烷气体体积分数进行检测。气室是红外探测器、传输光路、红外光源集成装配体,其结构和性能对器件性能至关重要。气室内壁设计成镀金的旋转抛物面,红外光经抛物面反射成近似平行的光束,该红外光束在气室内部传播过程被气室底盖反射到探测器,增加了甲烷气体的吸收光程,起到了提高气室的灵敏度的作用。设计完成后,经过甲烷环境的测试,反射式气室的稳定性、灵敏度、反应时间等都有良好的表现。In this design,a kind of chamber design process and test results of reflective infrared methane sensor which has good stability and high sensitivity are put forward.Infrared methane sensor is based on the principle of dispersion type infrared absorption spectroscopy;non-dispersive infrared（NDIR） detection technology is applied to get infrared of methane characteristics wavelength,then dual channel compensation technology is used to test volume fraction of methane in gas chamber.Chamber is composed of infrared detector,transmission optical way,infrared source integrated assembly,whose structure and performance are important for device.Inner wall of chamber is designed as paraboloid of revolution with Au film coating,and infrared is reflected to be approximately parallel light,which is reflected to detector while propagating in chamber,so as to increase absorption optical path of methane,and sensitivity of chamber is improved.After completing the design,methane environment test shows that performance such as stability,sensitivity,reaction time of reflective chamber are excellent.

关 键 词：甲烷 镀金膜红外气室 红外探测器 标定技术 

分 类 号：TH741[机械工程—光学工程]