罗兰全息光栅线密度误差分析与控制  

Analysis and Control of Groove Density Error for the Rowland Holographic Grating

作　　者：崔锦江[1] 孔鹏[2] 王帆[1] 檀慧明[1] 

机构地区：[1]中国科学院苏州生物医学工程技术研究所,江苏苏州215163 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《激光与光电子学进展》2013年第2期110-114,共5页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(60478034;61007063);国家重大科学仪器设备开发专项(2011YQ120023);国家创新方法工作专项(2008IM040700);中国科学院知识创新项目(100132H100);江苏省自然科学基金(BK2012188)资助课题

摘　　要：分析了罗兰光栅帕邢-龙格结构中光栅线密度误差对波长精度的影响。提出一种利用参考光栅在线检测罗兰全息光栅干涉场条纹密度的方法。将具有标准线密度的参考光栅放置在干涉场内曝光位置,通过检验曝光光束的自准直衍射光与空间滤波器中针孔位置的重合度来判断干涉场条纹密度误差。推导了干涉场条纹密度误差与曝光光束自准直衍射光偏移量的解析表达式,发现干涉场条纹密度误差与曝光光束自准直衍射光偏移量、罗兰光栅曲率半径和曝光光束波长有关。以曲率半径750.2mm的罗兰光栅为例,当采用441.6nm激光建立光路时,利用此方法可将干涉场条纹密度误差调整至0.035grooveμ排m以内。The relation between groove density error of the Rowland grating and wavelength accuracy for the Paschen-Runge mount is analyzed. An in-situ detection method for interference fringe density of the exposure field with which Rowland grating is made is proposed. A reference grating with expected groove density is put into the exposure field where the photoresist grating is exposed. The interference fringe density error of the exposure field is detected through the deviation between recording beam and its collimating diffracted light. The expression of interference fringe density error and deviation of recording beam＇s collimating diffracted light is deduced. It is discovered that the interference fringe density error is related to the deviation of recording beam＇s collimating diffraction light, grating curvature radius and exposure wavelength, but not the grating groove density. Taking a Rowland grating with 750.2 mm curvature radius for example, when the exposure wavelength is 441.6 nm, the interference fringe density error can be limited to 0. 035 groove/mm.

关 键 词：全息术 光谱仪 衍射光栅 罗兰圆 帕邢-龙格结构 线密度误差 

分 类 号：O433.4[机械工程—光学工程]