扫频光源OCT对单晶硅片制绒质量的检测  

Sweep Light Source OCT Method for the Test of Textured Monocrystalline Silicon

作　　者：于海民[1] 牛源[1] 刘桂林[1] 孟卓[2,3] 姚晓天[1,2,4] 李果华[1] 

机构地区：[1]江南大学理学院 [2]天津大学精密仪器与光电工程学院 [3]苏州光环科技有限公司 [4]General Photonics Corporation,5228 Edison Avenue,Chino California 91710,USA

出　　处：《激光与光电子学进展》2013年第2期178-181,共4页Laser & Optoelectronics Progress

基　　金：苏州光环科技有限公司的支持

摘　　要：光学相干层析(OCT)是一种新型的光学信号获取与处理方式,它可以对光学散射介质进行扫描,获得的三维图像,分辨率可以达到微米级。尝试利用扫频光源OCT对在相同的制绒溶液配比下,不同制绒时间的单晶硅片进行检测,通过处理三维图像数据,判断制绒质量,为单晶硅制绒检测提供一种新方法。Optical coherence tomography （OCT） is an novel optical signal acquisition and processing method which can capture micrometer-resolution three-dimensional images from optical scattering media. Monocrystalline silicon wafers obtained with different texturing time and same corrosion solution are measured by sweep light source OCT. Through processing the OCT acquired data, the quality of monocrystalline silicon in different texturing time can be estimated. It may provide a new method for the test of textured monocrystalline silicon.

关 键 词：医用光学 扫频光源OCT 单晶制绒 后向散射 轴向信号 

分 类 号：TN247[电子电信—物理电子学]