正压漏孔校准技术的发展概况  

Review of development of calibration technology for pressure leak

作　　者：冯焱[1] 李得天[1] 张涤新[1] 盛学民[1] 成永军[1] 孙雯君[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《真空》2013年第1期41-47,共7页Vacuum

摘　　要：介绍了国内外正压漏孔校准技术的研究概况,对校准装置的原理和组成进行了详细说明,对采用的校准方法进行了分析和讨论。以此为基础,归纳总结了正压漏孔校准技术中所涉及的关键技术,分析了技术发展的总体趋势,并对我国正压漏孔校准技术的研究工作提出了建议。The studies on pressure leak calibration technologies at home and abroad are introduced, with the operating principle and construction of calibrators described and discussed in detail, as well as the existing calibration methods. Then, the key technologies involving the pressure leak calibration are summarized with its developmental trend analyzed. Several suggestions are therefore given to the R＆D of pressure leak calibration technology in China.

关 键 词：真空计量学 正压漏孔 校准技术 综述 

分 类 号：TB77[一般工业技术—真空技术]