影响扩散硅压力传感器稳定性的因素及解决方法  

Stability of Piezoresistive Pressure Sensor and Influencing Factor

作　　者：唐慧[1] 季安[1] 章学群 孙艳宾 

机构地区：[1]沈阳仪器仪表工艺研究所

出　　处：《传感器世界》2000年第8期13-16,共4页Sensor World

摘　　要：本文分析了影响扩散硅压力传感器稳定性产生的原理,并依据半导体理论,在工艺上采取了相应的措施。大大改善的传感器的稳定性,使我们生产的传感器稳定性达到国外同类产品的先进水平。Reasons affecting the stability of piezoresistive pressure sensor have been analyzed. Through analysis many measurements have been adopted in the processing in terms of semiconductor theory. The stability of sensors has greatly been improved. The stability feature of sensors produced by us has caught up with advanced level of our partner in the world.

关 键 词：压力传感器 稳定性 扩散 硅 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]