多次压电效应对压电石英物性系数的影响  

Influence of Multiple Piezoelectric Effects on Physical Parameters of Piezoelectric Quartz

作　　者：张忠华[1] 王淑云[1] 程光明[1] 阚君武[1] 王鸿云[1] 

机构地区：[1]浙江师范大学精密机械研究所,金华321004

出　　处：《纳米技术与精密工程》2013年第1期45-50,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51075371;51205366);浙江省自然科学基金资助项目(Y4110315;Y1110509)

摘　　要：为改善石英器件与产品的性能以适应并推动微/纳机电系统技术的发展,从理论和实验两方面系统地研究了多次压电效应对压电石英弹性系数、压电系数和机电耦合系数等物性系数的影响.理论分析表明,外应力作用下多次压电效应对压电石英弹性系数及压电系数的影响分别是多次逆和多次正压电效应综合作用的体现.采用与压电石英晶体并联一个远大于其等效电容量的电容器的实验方法,测试了多次压电效应对石英物性系数的影响,获得了三次压电效应时石英的压电系数为0.04 pC/N,比未考虑多次压电效应时提高了1.75%,所对应的机电耦合系数亦增加了1.75%.To improve the performance of quartz devices and products to adapt to and to promote the development of micro/nano electromechanical systems, the influence of multiple piezoelectric effects on elastic coefficient, piezoelectric coefficient and electromechanical coupling factor of piezoelectric quartz crystals was theoretically and experimentally studied. The theoretical analysis shows that the influence of multiple piezoelectric effects on elastic coefficient and piezoelectric coefficient is caused by multiple direct piezoelectric effects and multiple converse piezoelectric effects, respectively. The influence of multiple effects on physical parameters of piezoelectric quartz crystal was tested by connecting piezo- electric quartz in parallel with a capacitor whose capacity is much greater than that of the quartz. Tertiary piezoelectric coefficient of piezoelectric quartz is obtained through the experiment, which is 0.04 pC/N. The experimental results indicate that multiple effects cause both piezoelectric coefficient and electromechanical coupling factor to increase by 1.75%.

关 键 词：压电 多次压电效应 石英晶体 压电系数 机电耦合系数 

分 类 号：TN384[电子电信—物理电子学]