Surface effects of adsorption-induced resonance analysis on micro/nanobeams via nonlocal elasticity  

作　　者：徐晓建 邓子辰 

机构地区：[1]Department of Engineering Mechanics,Northwestern Polytechnical University [2]State Key Laboratory of Structural Analysis for Industrial Equipment,Dalian University of Technology

出　　处：《Applied Mathematics and Mechanics(English Edition)》2013年第1期37-44,共8页应用数学和力学（英文版）

基　　金：Project supported by the National Basic Research Program of China(No.2011CB610300);the 111 Project of China(No.B07050);the National Natural Science Foundation of China(Nos.10972182, 11172239,and 10902089);the Doctoral Program Foundation of Education Ministry of China (No.20106102110019);the Open Foundation of State Key Laboratory of Structural Analysis of Industrial Equipment of China(No.GZ0802);the Doctorate Foundation of Northwestern Polytechnical University of China(No.CX201111)

摘　　要：The governing differential equation of micro/nanbeams with atom/molecule adsorption is derived in the presence of surface effects using the nonlocal elasticity. The effects of the nonlocal parameter, the adsorption density, and the surface parameter on the resonant frequency of the micro/nanobeams are investigated. It is found that, in ad- dition to the nonlocal parameter and the surface parameter, the bending rigidity and the adsorption-induced mass exhibit different behaviors with the increase in the adsorption density depending on the adatom category and the substrate material.The governing differential equation of micro/nanbeams with atom/molecule adsorption is derived in the presence of surface effects using the nonlocal elasticity. The effects of the nonlocal parameter, the adsorption density, and the surface parameter on the resonant frequency of the micro/nanobeams are investigated. It is found that, in ad- dition to the nonlocal parameter and the surface parameter, the bending rigidity and the adsorption-induced mass exhibit different behaviors with the increase in the adsorption density depending on the adatom category and the substrate material.

关 键 词：micro- and nano-electromechanical system （MEMS/NEMS） sensor nonlocalelasticity surface effect VIBRATION atom/molecule adsorption 

分 类 号：O485[理学—固体物理]