焦平面阵列反光板的优化设计与制作  

Design Optimization and Fabrication of the Focal Plane Array Reflector

作　　者：毛亮[1] 史海涛[2] 程腾[1] 欧毅[3] 陈大鹏[3] 张青川[1] 

机构地区：[1]中国科学技术大学中国科学院材料力学行为与设计重点实验室,安徽合肥230027 [2]北京空间飞行器总体设计部,北京100094 [3]中国科学院微电子研究所,北京100029

出　　处：《光学学报》2013年第1期61-68,共8页Acta Optica Sinica

基　　金：国家973计划(2011CB302105);国家自然科学基金(11072233;11102201;11127201);中央高校基本科研业务费专项资金(2090050017);中国博士后科学基金(20100480684)资助课题

摘　　要：光学读出红外热成像系统中,焦平面阵列(FPA)反光板的初始弯曲降低了系统的光学检测灵敏度。针对FPA的设计制作,提出了两种降低其反光板初始弯曲的优化设计方案:减薄反光板上金层厚度和制作带加强筋的反光板。在理论分析的基础上,设计制作了单元尺寸为200μm的反光板金层减薄FPA,其反光板曲率半径提高至原来金层未减薄FPA的4.71倍,系统光学检测灵敏度提高了5.2倍;单元尺寸为60μm的反光板带加强筋FPA,其反光板曲率半径提高至原来没有加强筋FPA的4.29倍,系统光学检测灵敏度提高了1.18倍。实验验证了理论分析的结果。In the optical readout infrared thermal imaging system,the initial reflector deformation of the focal plane array（FPA） decreases the optical detection sensitivity for the system greatly.According to the design and fabrication of the FPA,two optimized design schemes for reducing the initial deformation of the FPA reflector are put forward： thinning the Au layer on the reflector and fabricating reflector with stiffeners.Based on the theoretical analysis,a FPA with a unit size of 200 μm is fabricated and the Au layer of its reflector is thinned.Its reflector curvature radius and the optical detection sensitivity for the system are respectively increased to 4.71 times and 5.2 times of the FPA without thinning process.And a FPA with a unit size of 60 μm is fabricated,its reflector is with stiffeners.Its reflector curvature radius and the optical detection sensitivity for the system are respectively increased to 4.29 times and 1.18 times of that of the FPA without stiffeners.The experiments verified the result of theoretical analysis.

关 键 词：成像系统 焦平面阵列 非制冷红外成像 薄膜 微梁 

分 类 号：O438.2[机械工程—光学工程]