用视频显微镜实现显微干涉计量的实验研究  

Experimental Research on Microinterferometry Using Video Microscope

作　　者：钱克矛[1] 伍小平[1] 

机构地区：[1]中国科学技术大学力学与机械工程系,合肥230027

出　　处：《应用激光》2000年第3期97-100,共4页Applied Laser

摘　　要：采用视频显微镜作为显微成像和电子记录的工具进行显微干涉计量 ,光路简洁 ,调整方便。用显微云纹干涉系统和显微散斑干涉系统分别测量了物体的面内变形、离面位移和物体的形状。A video microscope was introduced as a tool for microimaging and electronical recording in microinterferometry. It makes the experimental setup simple and the optical adjustment easy. In order to show its effectivity, the inplane deformation,the offplane displacement and the shape are measured by a Moire microinterferometry system and two speckle microinterferometry systems, in which the video microscope is used. The experimental results are given.

关 键 词：视频显微镜 云纹干涉 显微干涉计量 散斑干涉 

分 类 号：TH744.3[机械工程—光学工程]