高质量WO_3薄膜的制备及其电致变色数码显示器件  

Preparation of the High Quality WO_3 Thin Film and Its Application in the Electrochromic Digital Display Devices

作　　者：罗坚义[1] 周洋洋[1] 陈润明[1] 曾庆光[1] 张梅[1] 

机构地区：[1]五邑大学应用物理与材料学院,江门529020

出　　处：《人工晶体学报》2013年第1期124-128,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金(11004153)资助项目;广东省自然科学基金(S2011040000636;10152902001000009);广东省科技计划项目(2009B030803015);广东高校优秀青年创新人才培养计划(LYM11123;LYM10131);广东省高等学校人才引进专项资金(粤财教[2011]431号)

摘　　要：本文首先探索热蒸发法制备高质量WO3薄膜的工艺参数,分别从基片类型,基片温度和蒸发速率三方面讨论和分析成膜的质量,获得在ITO玻璃基片最佳的蒸镀条件为蒸发电流为110 A,基片温度为250℃。其次,应用高质量WO3薄膜于全固态电致变色器件结构中,获得了良好的变色性能,实现逐段控制的数码显示效果。研究结果表明高质量WO3薄膜在电致变色器件,特别是双面显示器件方面具有潜在的应用前景。This paper firstly reported the study on the preparation parameters for the high quality WO3 thin film by thermal evaporation. The kinds of substrates, evaporation rates and substrate temperatures were considered to influence the quality of the deposited thin film, and the best evaporation condition for the ITO glass substrates, the thermal evaporation current at 110 A and the substrate temperature at 250 ℃ had been pointed out. Then, the prepared high quality WO3 thin film had been applied in the structure of solid-state electrochromic devices, which showed the good performance and the seven- segment digital display effect with each segment independence controlled. The results proved the potential application of the high quality WO3 thin film on the electrochromie devices, especially on double-side display devices.

关 键 词：WO3薄膜 热蒸发 电致变色 双面数字显示 

分 类 号：TQ164[化学工程—高温制品工业] TG74[金属学及工艺—刀具与模具]