激光缩束系统波前畸变精度分析  

Laser beam wave-front error reduction accuracy analysis

作　　者：赵建科[1] 李霞[1] 徐亮[1] 段亚轩[1] 

机构地区：[1]中国科学院西安光学精密机械研究所,陕西西安710119

出　　处：《红外与激光工程》2013年第1期79-83,共5页Infrared and Laser Engineering

基　　金：神光Ⅲ大科学工程项目资助课题

摘　　要：对大科学工程激光参数系统中的激光缩束系统各项装调误差进行了分析,缩束系统中组合物镜系统和目镜系统离焦误差对于系统波前畸变影响最大,并对不同离焦量产生的波前畸变PV值进行了分析,得到缩束系统波前畸变的变化与系统物镜和目镜离焦量并非线性关系。采用大孔径长焦距平行光管、光纤激光器和哈特曼传感器组成激光波前测试系统对激光缩束系统的波前进行实时测量和验证,经过波前计算机辅助技术,使其技术参数达到了波前畸变PV值优于0.2λ(λ=1.053μm)的要求。In the laser parameters systems of big science projects, the installation errors of the shrink- beam system were analyzed. The result shows that the defocus between the objective lens system and the eyepiece system affects the wavefront distortion error of the system most. Besides, the PV values of the wavefront aberration caused by the defocus between the objective lens system and the eyepiece system of the shrink-beam system were analyzed and a conclusion that there was a non-linear relationship between the PV values and the defocus was drawn. By the test system composed of large aperture long focal length collimator, fiber lasers and Hartmann wavefront sensors, the wavefront aberration of the laser shrink-beam system was measured and verified real-time. The result shows that by wavefront computer- aided technology, the PV values of wavefront aberration can be less than 0.2λ（λ=1.053 μm）.

关 键 词：激光参数测量 缩束系统 波前畸变 哈特曼传感器 光纤激光器 

分 类 号：TN247[电子电信—物理电子学]