载能原子沉积Au/Au(100)外延薄膜生长的计算机模拟  

INVESTIGATION OF Au/Au(100)FILM GROWTH WITH ENERGETIC DEPOSITION BY KINETIC MONTE CARLO SIMULATION 

作　　者：张庆瑜[1] 马腾才[1] 潘正瑛[2] 汤家镛[2] 

机构地区：[1]大连理工大学三束材料改性国家重点实验室,大连116024 [2]复旦大学现代物理研究所基于加速器的原子及原子核物理开放实验室,上海200433

出　　处：《物理学报》2000年第6期1124-1131,共8页Acta Physica Sinica

基　　金：国家自然科学基金! (批准号 :19835 0 30 )重点资助的课题&&

摘　　要：在分子动力学研究的基础上建立了载能原子的沉积动力学物理模型 ,并根据在局域环境下的表面原子扩散模型 ,通过运动学MonteCarlo方法研究了载能粒子沉积Au/Au(10 0 )薄膜的初期生长过程 ,探讨了载能粒子沉积对薄膜生长的影响及其随基体温度的变化 .通过计算机模拟发现 :载能粒子沉积的Au/Au(10 0 )薄膜生长仍然呈现层状生长 三维岛状生长 准二维层状 .在薄膜生长初期 ,载能粒子的作用是促进表面原子的成核 ,增加基体表面的缺陷 ;在薄膜的生长阶段 ,载能粒子通过抑制三维岛的生长速率起着平滑薄膜表面形貌的作用 .载能粒子是通过改变薄膜局域表面形貌而影响着薄膜的生长行为 。The Au/Au(100) epitaxial growth with energetic deposition was simulated by using kinetic Monte Carlo method.The influences of energetic atoms on morphology and atomistic processes in the early stage of film growth were investigated.The reentrant layer\|by\|layer growth was observed in the temperature range of 450?K to 100?K.We found the energetic atoms can promote the nucleation and island growth in the early stages of film growth and enhance the smoothness of film surface at temperatures of film growth in 3\|dimensional mode and in quasi\|two\|dimensional mode.The atomistic mechanism that promotes the nucleation and island growth and enhances the smoothness of film surface is discussed.

关 键 词：金/金薄膜 载能原子沉积 外延薄膜生长 计算机模 

分 类 号：O484.1[理学—固体物理]