酸碱复合催化溶胶-凝胶法制备SiO_2减反膜及膜性能研究  

Preparation of SiO_2 Anti-reflective Coatings by Acid/Base Composite Catalyzed Sol-gel Method and Research on Their Properties

作　　者：窦雯雯[1] 牛玉超[1] 黄国威[1] 徐勇[1] 王献忠[1] 王孝丽[1] 张琳琳[1] 

机构地区：[1]山东建筑大学材料科学与工程学院,济南250101

出　　处：《表面技术》2013年第1期63-66,共4页Surface Technology

基　　金：山东省科技发展计划(2010G0020318);山东省自然科学基金(ZR2010EM062);济南市高校自主创新计划(201004048);山东省教育厅科技计划(J12LA12)

摘　　要：采用酸催化法、碱催化法和酸碱复合催化法制备了SiO2溶胶,进而制得SiO2减反膜。表征了薄膜的表面形貌,测定了薄膜的透射率和硬度。结果表明,不同催化溶胶制得的膜层在表面形貌、减反效果和薄膜硬度等方面存在明显差异:酸催化得到的薄膜,孔隙率和透过率最低,但硬度和抗划伤性最好;碱催化得到的薄膜,孔隙率和透过率最高,但硬度和抗划伤性最差;酸碱复合催化得到的薄膜,孔隙率、透过率、硬度和抗划伤性能介于以上二者之间,性能与酸碱复合催化溶胶的制备工艺密切相关。The SiO2 sol and anti-reflective coatings were prepared by the acid, base, and acid/base composite catalyzed methods. The surface morphologies of coatings were characterized and their transmissivity and hardness were measured . The experiments results show that, the surface morphology, anti-reflective effect and hardness of the coatings from three sols are very different; The coating from acid-catalyzed sol has the minimum porosity, lowest transmissivity, but highest hardness and best scratch resistance; The coating from ammonia-catalyzed sol gets maximum porosity, highest transmissivity, but lowest hardness and worst scratch resistance ; The properties of the coatings from acid/base composite catalyzed sol are between those of the coatings by acid and base catalyzed sol-gel process like porosity, transmissivity, hardness, and scratch resistance performance. These properties will be directly affected by acid/base composite catalyzed sol-gel process.

关 键 词：溶胶-凝胶 酸碱复合催化 SIO2 减反膜 透过率 表面形貌 

分 类 号：O484.4[理学—固体物理]