晶圆减薄机弹性铰链的加工工艺研究  

Processing Technology Research on Resilient Hinge Of Backside Grinding Machine

作　　者：张敏杰[1] 杨生荣[1] 王仲康[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2013年第1期55-58,共4页Equipment for Electronic Products Manufacturing

摘　　要：介绍了一种减薄机关键零件弹性铰链的零件性能及材料选择,分析了零件的加工工艺流程、工艺难点,制定了相应的工艺路线。最后对加工后的零件安装在设备上进行了工艺验证。该零件的成功应用为其他类似弹性铰链的设计加工可提供一定的借鉴作用。This paper briefly introduces the performance and material selection of Resilient Hinge Of Backside Grinding Machine,analyses the processing technological difficulty, then makes the corresponding the processing technological routte and analyses the whole technological process flow. Finally,the processing of parts installed in equipment on the process validation.The technological process is widely used in the large-lot production of Resilient Hinge and the processing of other similar Resilient Hinge can borrow ideas from the described technological process flow

关 键 词：晶圆减薄机 弹性铰链 工艺路线 工艺流程 

分 类 号：TH161.2[机械工程—机械制造及自动化]