Electrically induced nanostructuring over large area——a new idea from concept to practice  

作　　者：Li Xiangming Ding Yucheng Shao Jinyou Liu Hongzhong 

机构地区：[1]School of Mechanical Engineering,Xi'an Jiaotong University [2]State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University

出　　处：《Engineering Sciences》2013年第1期23-28,38,共7页中国工程科学（英文版）

基　　金：Major Research Plan of NSFC on Nanomanufacturing(No.90923040);National Basic Research Program of China(No.2009CB724202)

摘　　要：The paper proposes a novel nano-patterning method called electrically induced nanostructuring, where an external electric field, insteadof the external mechanical pressure, is applied to generate an electrohydrody- namic force acting on the polymer-air interface to drive the polymer＇ s flow into the mold cavities. This electri- cally induced nanostrueturing method no longer requires a large mechanical pressure externally applied for actua- ting the polymer filling in the mold cavities, and has been used to successfully fabricate micro/nano pillar arrays of a high aspect ratio （up to 10）, which have been usually considered to be ＂difficult to fabricate＂ by conventional molding or nanoimprinting processes.

关 键 词：nano-manufacturing electrohydrodynamic force high aspect ratio NANOIMPRINTING 

分 类 号：TB383[一般工业技术—材料科学与工程] O614.22[理学—无机化学]