Roll-to-roll imprint for high precision grating manufacturing  

作　　者：Liu Hongzhong Shi Yongsheng Yin Lei Jiang Weitao Lu Bingheng 

机构地区：[1]School of Mechanical Engineering,Xi'an Jiaotong University [2]State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University

出　　处：《Engineering Sciences》2013年第1期39-43,共5页中国工程科学（英文版）

基　　金：The Major Special Projects of Ministry of Science and Technology of China(No.2011ZX04014-071);National Natural Science Foundation of China(No.51275400)

摘　　要：In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of imprint roller and backup roller,and also the imprint pressure,are investigated. Various gratings with different periods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint,a calibration system is built with a dual-frequency laser interferometer. By the calibration,the self-made gratings can achieve ±4μm accuracy in 45mm measuring distance.

关 键 词：high-precision gratings roll-to-roll imprint MISALIGNMENT roller mold 

分 类 号：TP335.1[自动化与计算机技术—计算机系统结构] TN949.7[自动化与计算机技术—计算机科学与技术]