Influence of structure of integrated optical thin-film filter on performance  

作　　者：WU YiLong LIU Shuang WEI GuangLu LU RongGuo LIU Yong ZHONG ZhiYong 

机构地区：[1]School of optoelectronic information,University of Electronic Science and Technology of China

出　　处：《Chinese Science Bulletin》2013年第7期563-566,共4页

基　　金：supported by the National Basic Research Program of China ("973" Program) (Grant Nos. 2012CB315701 and 2012CB315702);the National Natural Science Foundation of China (Grant No. 61177035);the National High-Tech Research & Development Program of China ("863" Program) (Grant No.2011AA010300)

摘　　要：Thermo-optic tunable thin-film filter based on Fabry-Perot(F-P) cavity structure is a very attractive alternative integrated optical device.In this simulation-based paper,the key performance of typical thermo-optic tunable F-P filter is discussed by analyzing the structure of Distributed Bragger Reflectors(DBR) and the thermo-optic property of cavity thin-film material.The results indicate a negative correlation between the number of DBR periodical layers and full width at half maximum(FWHM),and a proportional relation between thermal-optic coefficient of material and tuning range.In addition,the cavity is more sensitive to the optical property than the reflection layers according to the analysis of thickness error of the film.And to solve slow thermal response without incurring other performance loss,a novel structure of the suspended cavity is proposed,in which only the cavity is heated.Thermo-optic tunable thin-film filter based on Fabry-Perot （F-P） cavity structure is a very attractive alternative integrated optical device. In this simulation-based paper, the key performance of typical thermo-optic tunable F-P filter is discussed by analyzing the structure of Distributed Bragger Reflectors （DBR） and the thermo-optic property of cavity thin-film material. The results indicate a negative correlation between the number of DBR periodical layers and full width at half maximum （FWHM）, and a proportional relation between thermal-optic coefficient of material and tuning range. In addition, the cavity is more sen- sitive to the optical property than the reflection layers according to the analysis of thickness error of the film. And to solve slow thermal response without incurring other performance loss, a novel structure of the suspended cavity is proposed, in which only the cavity is heated.

关 键 词：集成光学器件 薄膜滤波器 性能损失 结构 薄膜材料 薄膜过滤器 FWHM 调谐范围 

分 类 号：TN256[电子电信—物理电子学] TN929.11