Study on the large-scale assembly and fabrication method for SWCNTs nano device  

作　　者：XU Ke TIAN XiaoJun WU ChengDong LIU Jian LI MengXin DONG ZaiLi 

机构地区：[1]State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences [2]School of Information & Control Engineering,Shenyang Jianzhu University [3]School of Information Science and Engineering,Northeastern University

出　　处：《Science China Chemistry》2013年第3期556-561,共6页中国科学（化学英文版）

基　　金：supported by the National Natural Science Foundation of China (Grant No. 51005230);China Postdoctoral Science Foundation(Grant No. 2012M520654);the Education Department of Liaoning Province Science and Technology Research Projects (Grant No. L2012213)

摘　　要：The large-scale assembly and fabrication method for single-walled carbon nanotube(SWCNT) nano devices was implemented.Assembly of SWCNT field effect transistor(FET) was realized by floating potential dielectrophoresis approach.The simulation of floating potential distribution of the chip was performed by comsol multiphysics coupling software.Six hundred devices were assembled on the area of less than one square centimeter.The fabricated devices were characterized by atomic force microscopy and scanning electron microscopy.The experimental results showed that large-scale assembly had been realized,and the success rate of ideal assembly for SWCNT FET had been assessed.The large-scale assembly and fabrication method for single-walled carbon nanotube （SWCNT） nano devices was implemented. Assembly of SWCNT field effect transistor （FET） was realized by floating potential dielectrophoresis approach. The simula- tion of floating potential distribution of the chip was performed by comsol multiphysics coupling software. Six hundred devic- es were assembled on the area of less than one square centimeter. The fabricated devices were characterized by atomic force microscopy and scanning electron microscopy. The experimental results showed that large-scale assembly had been realized, and the success rate of ideal assembly for SWCNT FET had been assessed.

关 键 词：LARGE-SCALE single-walled carbon nanotube ASSEMBLY floating potential dielectrophoresis 

分 类 号：TN16[电子电信—物理电子学] TB383[一般工业技术—材料科学与工程]