飞秒激光微孔加工  

Femtosecond Laser Drilling of Micro-Holes

作　　者：夏博[1] 姜澜[1] 王素梅[1] 闫雪亮[1] 刘鹏军[1] 

机构地区：[1]北京理工大学先进加工技术国防重点学科实验室,北京100081

出　　处：《中国激光》2013年第2期1-12,共12页Chinese Journal of Lasers

基　　金：国家973计划(2011CB013000);国家自然科学基金(90923039;51025521)资助课题

摘　　要：飞秒激光具有超快、超强的特性,在微孔加工中有着独特的优势,尤其是针对高品质、大深径比的微孔加工有着不可替代的作用。介绍了超短脉冲激光微孔加工的优势以及研究意义,综述了近十几年来基于超短脉冲激光的微孔加工研究现状,并讨论了材料、激光脉冲参数、加工方式和加工环境等因素对超短脉冲激光微孔加工的影响。指出了现阶段超短脉冲激光微孔加工的应用前景,并总结了超短脉冲激光微孔加工当前所面临的挑战,以及今后的研究重点。With ultrashort pulses and ultra high power densities, femtosecond laser has unique advantages in microholes drilling, especially for high-quality and high-aspect-ratio micro-holes. The advantages and study implications of ultrashort pulse laser drilling of micro-holes are introduced. Major progress in femtosecond laser drilling of microholes is reviewed. The impacts of materials properties, laser parameters, drilling methods and ambient environments are discussed. In addition, potential applications, key challenges and future research trends are presented.

关 键 词：超快光学 超短脉冲激光 微孔加工 飞秒脉冲 脉冲序列 

分 类 号：O436[机械工程—光学工程]