严格耦合波收敛层数的研究  

Estimation of the number of convergence layers in rigorous coupled-wave analysis

作　　者：温朗枫[1,2] 熊伟[2] 李国光[2] 陈树强[1] 付永启[1] 

机构地区：[1]电子科技大学物理电子学院,成都610054 [2]中国科学院微电子研究所,北京100029

出　　处：《中国科技论文》2013年第1期58-61,共4页China Sciencepaper

基　　金：国家科技重大专项(2011ZX02101-005)

摘　　要：研究了梯形光栅的结构参数与分层数的关系,通过减少分层数来提高求解光栅衍射效率计算速度。采用开发的软件进行仿真模拟,得到正入射时,TE和TM的收敛层数随着顶宽和周期的增大而减小;TE在占空比小于0.4时,收敛层数随着占空比的增大而减小,之后基本保持不变;TM在占空比为0.5时所需的收敛层数最大,并呈现向两边递减的趋势。结果表明:根据这些规律适当减少分层数可有效提高计算效率。We studied the relationship between the structure parameters of the trapezoidal grating and the number of layers, aming to provide theoretical basis for improving the speed of calculating grating diffraction efficiency by reducing the number of layers. Simulation with the self-developed software proves that in the normal incident, the number of convergence layers of TE and TM decreases with the increasing top width or period. When the duty cycle is less than 0.4, with the duty cycle increasing the number of convergence layers of TE decreases, and then remains unchanged, but the number of convergence layers maximizes when the duty cycle reaches 0. 5. According to this relationship, the calculation speed can be improved by reducing the number of conver- gence layers appropriately.

关 键 词：光栅 分层数 严格耦合波分析 计算效率 

分 类 号：TN253[电子电信—物理电子学]