双面金属铝包覆介质波导测量介质厚度和折射率  

Measurement of Thickness and Refractivity of Thin Film Utilizing Double Al-cladding Optical Waveguide

作　　者：费彬城[1] 陈良雷[1] 陈余行[1] 朱鹏飞[1] 

机构地区：[1]上海工程技术大学,上海201620

出　　处：《大学物理实验》2013年第1期1-3,共3页Physical Experiment of College

基　　金：上海市大学生创新活动计划项目(B-8906-11-01148);上海工程技术大学教育科学研究项目(y201121001)

摘　　要：利用双面金属铝包覆波导的测量方法,测量了硅片的厚度和折射率。这种方法利用双面金属铝包覆波导的超高阶模的偏振不灵敏和对金属层要求较低的特点,降低了对仪器的要求和测量的成本。同时,由于应用高灵敏的超高阶导模为探针,测量精度较高,结果显示测量精度在1%以内。Utilizing the millimeter-scale symmetrical Al-cladding optical waveguide,the thickness and refractive indexes of a thin film are measured.Due to the unusual features of the ultrahigh-order modes and low cost of Al,the apparatus of this method are easy fabricated and the cost is very low.Based on the high sensitivity of ultrahigh-order modes,this method is very reliable,the results show that the measurement precision is less than 1%.

关 键 词：双面金属波导 折射率 超高阶模 耦合 

分 类 号：TN253[电子电信—物理电子学]