反应等离子体制备碳锥及其表征  

Preparation and characterization of carbon cones by reaction plasma

作　　者：陈玉安[1] 陈轩[1] 徐幸梓[1] 王必本[2] 

机构地区：[1]重庆大学材料科学与工程学院,重庆400044 [2]重庆理工大学化学与化工学院,重庆400054

出　　处：《重庆大学学报（自然科学版）》2013年第1期98-102,共5页Journal of Chongqing University

基　　金：重庆市自然科学基金资助项目(CSTC2009BA4027)

摘　　要：利用等离子体增强热丝化学气相沉积系统,用CH4、H2和NH3为反应气体,分别在沉积有钛膜和碳膜的Si片衬底上制备了锥形碳结构,采用场发射扫描电子显微镜(FESEM)、X射线能谱仪(EDX)和显微Raman光谱仪对其形貌和结构进行了表征。SEM结果表明在沉积有碳膜的Si片衬底上易形成碳锥,EDX谱和Raman谱进一步表明形成的碳锥为碳氮结构,由sp3 C-N、sp2 C和sp2 C=N键形成。根据溅射机制和扩散机制,分析了碳锥的形成。同时,还对碳锥Raman谱的荧光背景进行了分析,结果表明由于氮的掺杂,使得碳锥由非极性的碳材料变成为极性碳材料。Carbon cones are prepared on Si substrates film in plasma-enhanced hot filament chemical vapor deposition system using CH4 , H2 and NHa as the reaction gas, and the substrates are deposited with Ti and carbon film, respectively. Morphology and structure of the carbon cones are characterized by field emission scanning electron microscopy （FESEM）, energy dispersive X-ray （EDX）and micro-Raman spectroscopy. The SEM results indicate that the carbon cones are formed on the Si substrate deposited with carbon film. Furthermore, the EDX and Raman spectra indicate that the formed carbon cones are carbon nitride structure, which are composed of spa C--N, sp2 C and sp2 C=N bonds. According to the mechanisms of sputtering and diffusion, the formation of carbon cones is analyzed. Simultaneously, the photoluminescence background in the Raman spectrum of carbon cones is analyzed, and results indicate that the carbon cone evolves from nonpolar carbon material to polarity carbon material due to the doping of nitrogen.

关 键 词：反应等离子体 碳锥 拉曼光谱 溅射 扩散 

分 类 号：O484.1[理学—固体物理]