环形叉指电极型压电鼓膜驱动器的制备及其性能测试  

Preparation and characterization of piezoelectric diaphragm actuator based on ring-shaped interdigitated electrodes

作　　者：尹伊[1,2] 曹贵川[1] 祁康成[1] 叶辉[2] 詹文博[2] 

机构地区：[1]电子科技大学光电信息学院,四川成都610054 [2]浙江大学现代光学仪器国家重点实验室,浙江杭州300127

出　　处：《光电子．激光》2013年第2期226-233,共8页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(60578012);中央高校基本科研业务费(ZYGX2012J059)资助项目

摘　　要：制备了一种基于Pb(Zr52Ti48)O3(PZT52)材料的自适应光学用压电驱动器。驱动器采用鼓膜结构,其工作区域由主动层—PZT52压电层和被动层—ZrO2/Si复合层两部分构成。PZT52压电层采用环形叉值电极(IDT)驱动。采用Si(100)单晶作为衬底,并采用溶胶-凝胶(Sol-gel)法在其上制备ZrO2阻挡层和PZT52压电层,其中引入PbTiO3(PT)种子层有利于PZT52膜层的(110)择优取向。随后在其上热蒸镀Al顶电极,并采用光刻方法制备图形,得到的IDT电极最大环形直径为10.5mm,电极间距为0.05mm,中心非激活区域直径为2mm。鼓膜结构则通过对Si衬底背部进行各向异性湿法刻蚀(ODE)得到,保留的支持层厚度为5～10μm,直径为12mm。测试结果表明,压电驱动器阵列单元在100kV/cm驱动下,可产生6.5μm左右的形变量。最后利用有限元分析方法(FEM)拟合了压电驱动器单元的面型,并分析了其形变模式产生的内部原因。This paper describes the preparation and characterization of unimorph actuators for adaptive optics based on the Pb（Zr0.52 Ti0.48 ） 03 （PZT52） thin film. The actuator utilizes a unimorph membrane （diaphragm） structure consisting of an active PZT piezoelectric layer and a passive ZrO2/Si composite layer. The PZT layer in the unimorph actuator is driven by ring-shaped interdigitated electrodes （IDT- mode）. To fabricate the diaphragm structures,the Si （100） wafer is used as substrate,on which PZT52 and ZrO2 layer are deposited by a modified sol-gel process. The PZT layer can be crystallized with pre- ferred （110） orientation by using PbTiO~ （PT） material as a seed layer. The A1 reflective layer is deposi ted and patterned into top electrode geometries by lithographic process, subsequently. The electrode spac ing is 50μm and the diameter of the inactive circular regions is 2 ram. The diaphragms are released using orientation-dependent wet etching （ODE） with 5-10 μm residual silicon layers. The size of the dia- phragms is 12 mm in diameter and the outer IDT diameter （10.5 mm） is fixed at 87.5% of the dia- phragm diameter. The measured maximum central deflection at 100 kV/cm is approximately 6. 5 μm. The deflection profiles are also modeled using finite element method （FEM） and their intrinsic strain be- haviors are evaluated.

关 键 词：自适应光学 压电鼓膜驱动器 凝胶-凝胶sol-gel法 Pb(Zr52Ti48)O3(PZT52) 压电系数d33 

分 类 号：O436[机械工程—光学工程] O484[理学—光学]