不同能量密度的飞秒激光辐照对单晶硅的影响研究  

Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities

作　　者：马鹏飞[1,2] 王克栋[1,2] 常方高[1,2] 宋桂林[1,2] 杨海刚[1,2] 王天兴[1,2] 

机构地区：[1]河南师范大学物理与信息工程学院,新乡453007 [2]河南省光伏材料重点实验室,新乡453007

出　　处：《人工晶体学报》2013年第2期273-277,共5页Journal of Synthetic Crystals

基　　金：河南省基础与前沿技术研究计划项目(122300410230);河南师范大学青年基金项目(2012QK09)

摘　　要：利用飞秒激光在空气中对单晶硅进行扫描刻蚀,在硅表面形成一系列平行的刻蚀槽,刻蚀槽底部为密集排列的微纳米颗粒。这种微纳米结构使得硅表面在各角度都呈现黑色,同时这种微纳米结构降低了硅材料的反射率,提升了硅材料的光吸收能力。本文通过对单晶硅表面进行不同能量密度的飞秒激光辐照,发现这种降低硅表面反射率的微纳米结构的形成和其单位面积上受到辐照的激光能量密度有直接关系,过高和过低的激光通量都不利于微纳米结构的产生。The monocrystalline silicon sample was irradiatied by femtosecond laser in the air to fabricate a series of parallel etched grooves in the silicon surface, and the bottom of the etched grooves densely packed by micro/nano-particles. The treated silicon samples surface were displayed in black at various angles, while the micro/nano structure reduces the reflectivity of the silicon material and which could enhance the ability of light absorption to silicon material. In this paper, various energy densities of the femtosecond laser irradiated the silicon material to fabricate the micro/nano-particles which could reduce the reflectivity of the silicon , there was a special relationship founded between the energy densities and the formation of micro/nano- structures , only the suitable laser flux was conducive to the generation of micro/nano-particles.

关 键 词：飞秒激光 辐照 硅 微纳米结构 

分 类 号：O774[理学—晶体学]