形状记忆合金/硅复合膜驱动的微泵  

A Micropump Actuated by NiTi/Si Composite Membrane

作　　者：徐东[1] 蔡炳初[1] 王莉[1] 丁桂甫[1] 周勇[1] 俞爱斌[1] 

机构地区：[1]上海交通大学信息存储研究中心

出　　处：《微细加工技术》2000年第4期50-55,共6页Microfabrication Technology

摘　　要：形状记忆合金 /硅复合膜驱动的微泵由一个可形变腔体和两个单向硅薄片阀组成。微驱动膜利用NiTi形状记忆合金薄膜相变时具有大的可回复应力和Si衬底膜的反偏置力 ,产生双向往复振动。采用图形化的NiTi薄膜作为热诱发相变的加热电阻 ,有效地提高了动态响应频率 ,同时降低了驱动功率。通过驱动结构的优化设计 ,增加了驱动位移和工作寿命。微泵采用Si表面和立体微加工工艺、金 -硅共晶键合等技术制备。它的外形尺寸为 6mm× 6mm× 1 .5mm ,最大输出流量为 340 μl/min ,最高驱动频率为 1 0 0Hz,往复振动次数大于 4× 1 0A micropump is composed of a deformable chamber and two Si flap check valves.The two way driving membrane is driven by shape recoverable force of NiTi thin film and biasing force of Si membrane.The pump has a extremely good performance,such as high pumping yield (up to 340μl/min),low power consumption,high working frequency(up to 100Hz)and long working life(4×10 7 reciprocating cycle).All these advantages are attributed to the patterning of NiTi thin film used as heating element for heat?induced phase transition and optimizing design of NiTi/Si actuated structure.The pump was manufactured by micromachining technologies and Au?Si eutectic bonding.The outer dimension of the micropump is 6mm×6mm×1.5mm.

关 键 词：形状记忆合金薄 硅 微驱动器 微泵 复合膜驱动 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]