Dy^(3+)和La^(3+)掺杂ZnO薄膜的特点及其气敏传感特性  

Characteristics and Gas Sensing Properties of ZnO Thin Films Doped by Dy^(3+) and La^(3+)

作　　者：陈雪[1] 王纯子[1] 黄凯[1] 康俊勇[1] 

机构地区：[1]厦门大学物理与机电工程学院福建省半导体材料与应用重点实验室,福建厦门361005

出　　处：《厦门大学学报（自然科学版）》2013年第2期160-164,共5页Journal of Xiamen University：Natural Science

基　　金：国家重点基础研究发展计划(973)项目(2011CB301905;2012CB619301);国家自然科学基金项目(61108064;61227009);中央高校基本科研业务费专项(2010121056)

摘　　要：采用真空蒸发的方法制备了掺杂原子比为3%、5%和9%的La掺杂和Dy掺杂的ZnO薄膜.用扫描电子显微镜(SEM)、X射线衍射(XRD)谱和X射线光电子能谱(XPS)表征了所制得的ZnO薄膜的特性.发现所有薄膜都沿C轴取向优先生长.在对ZnO薄膜气敏特性的测量中,在低温条件下掺杂ZnO薄膜的电阻比非掺杂ZnO薄膜的小,且对乙醇和丙酮的灵敏度显著增强,且其中Dy掺杂的ZnO薄膜的气敏特性较La掺杂的ZnO薄膜为高.而空气中暴露9个月后的薄膜的气敏特性表明掺杂ZnO薄膜具有很好的稳定性.同时讨论了气敏传感机制和掺杂行为对薄膜灵敏度的影响.La and Dy-doped ZnO thin films were prepared via vacuum evaporation method at mass fraction of 3%,5% and 9% dopi ng.The obtained films were characterized by scanning electron microscopy （SEM）,X-ray diffraction （XRD） and X-ray photoelectron spectroscopy （XPS）.The results indicated that all films showed a preferred C-axis growth orientation.Compared with undoped ZnO thin films,the doped films exhibited a downshift of resistance at a low temperature and remarkable increase of sensitivity to ethanol and acetone vapour,and the sensitivity of Dy-doped ZnO thin films were higher than the sensitivity of La-doped ZnO thin films.The films were then exposed bare in air for 9 months and the sensitivity was remeasured.All the films remained the sensitivity at a high level which indicated an excellent stability.The sensing mechanism and the effect of doping behaviour were also discussed.

关 键 词：薄膜 传感器 LA掺杂 Dy掺杂 乙醇 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]