金属有机物热分解成膜技术研究进展  

Advances in pyrolytic technology of metallo-organic compounds

作　　者：孙春文[1] 胡万起[1] 李道昭[1] 王晓岚 

机构地区：[1]中国科学院化工冶金研究所,北京100080

出　　处：《现代化工》2000年第11期13-16,34,共5页Modern Chemical Industry

摘　　要：金属有机物的分解过程 (MOD)是一种生成无机膜的新技术 ,它具有很多优点。本文介绍了用作前驱体配料的金属有机化合物应满足的基本条件及其合成方法 ,重点讲述了MOD工艺过程和其在固体氧化物燃料电池中及电子等行业中的应用。The metallo organic decomposition (MOD) process is a new technique with many advantages for producing inorganic films. This paper introduces the basic conditions required to satisfy metallo organic compounds used as precursors as well as their synthesis methods. The MOD process and its applications in solid oxide fuel cells (SOFC) and in the electronic industry are highlighted.

关 键 词：MOD工艺 膜的制备 应用 

分 类 号：TQ26[化学工程—有机化工] TQ12