工作压强对射频辉光放电H_2/C_4H_8等离子状态的影响  

Influence of working pressure on the state of H_2/C_4H_8 glowing discharge plasma

作　　者：李蕊[1,2] 何智兵[1] 杨向东[2] 何小珊[1] 牛忠彩[1,2] 贾晓琴[1,2] 

机构地区：[1]中国工程物理研究院,激光聚变研究中心,绵阳621900 [2]四川大学,原子与分子物理研究所,成都610065

出　　处：《物理学报》2013年第5期474-480,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10974139;10964002)资助的课题~~

摘　　要：利用辉光放电技术采用等离子体质谱诊断的方法研究了不同工作压强下H2/C4H8混合气体等离子体中主要正离子成分及其能量的变化规律,并分析了压强对H2/C4H8混合气体的离解机理以及主要正离子形成过程的影响.结果表明:随着工作压强的增加,碳氢碎片离子的浓度和能量均逐渐减小.当工作压强为5Pa时,H2/C4H8混合气体等离子体中C3H5+相对浓度最大;压强为10Pa时,C3H3+相对浓度最大;压强为15,20Pa时,C2H5+相对浓度最大;压强为25Pa时,C4H9+相对浓度最大.对H2/C4H8等离子体中的主要组分及其能量分布所进行的定性分析,将为H2/C4H8混合气体辉光放电聚合物涂层的工艺参数优化提供参考技术基础.The variations of the main positive ion components and their energies for the plasma of H2/C4Hs gas mixture under different working pressures are investigated using the glow discharge technique and plasma mass spectrometry diagnostic method, and the effects of work pressure on both the dissociation mechanism of the mixed gas H2/C4Hs and the forming process of the main positive are analyzed. The results show that both the intensity and energy of the C-H segment ions in H2/C4Hs plasma decrease with pressure increasing. The relative concentration of m/e 41（C3H＋） reaches a maximum when work pressure is 5 Pa. And when the pressure is 10 Pa, the relative concentration ofm/e 39（C3H＋） is largest; when the pressures are 15 Pa and 20 Pa, the relative concentration ofm/e 29 （C2H＋） is highest; when the pressure is 25 Pa, the relative concentration of m/e 57（C4H＋） is biggest. The component and its energy distribution of H2/C4Hs plasma are qualitatively analyzed. The results will serve as a reference to the optimization of parameters for glow plasma polymer coatings.

关 键 词：辉光放电技术 等离子体质谱诊断 工作压强 

分 类 号：O536[理学—等离子体物理]