超高分辨光谱仪的分辨率检测方法研究  

Superhigh Spectral Resolution Measurement of Spectrometer

作　　者：刘盛刚[1] 翁继东[1] 陶天炯[1] 

机构地区：[1]中国工程物理研究院流体物理研究所,四川绵阳621900

出　　处：《光谱学与光谱分析》2013年第4期903-905,共3页Spectroscopy and Spectral Analysis

基　　金：冲击波物理与爆轰物理国防科技重点实验室基金项目(9140C671001120C6707)资助

摘　　要：光谱分辨率是光谱仪最重要的指标之一,依据瑞利判据、基于光外差的基本原理,提出了一种可实现光谱仪超高分辨率检测的方法,并对该方法的测量不确定度进行了详细分析。搭建了实验光路,对某型号光谱仪的分辨率进行了检测,实验结果表明该光谱仪的分辨率优于18.9pm,测量标准不确定度为2.3pm;采用波数表示时,该光谱仪的分辨率优于0.078 8cm-1,测量标准不确定度为0.009 6cm-1。The spectral resolution is one of the most important indexes of spectrometer.A new method is put forward for measuring the superhigh spectral resolution based on the Rayleigh criterion and the optical heterodyne,and the uncertainty of this method is analyzed.The spectral resolution of some spectrometer was measured using this method,and the experimental results show that the spectral resolution is higher than 18.9 pm,and the standard uncertainty is 2.3 pm.When showed using wave number,the spectral resolution is higher than 0.078 8 cm-1,and the standard uncertainty is 0.009 6 cm-1.

关 键 词：瑞利判据 光外差 超高分辨率 检测 

分 类 号：O433.4[机械工程—光学工程]