基于单端口多模态微悬臂梁的谐振式大量程智能气体传感器(英文)  

A Smart Wide Range Resonance Gas Sensor with a Multi-Mode Single-Port Micro-Cantilever

作　　者：赵嘉昊[1] 李鹏[1] 管镠[1] 李翔宇[2] 尤政[1] 

机构地区：[1]精密测试技术及仪器国家重点实验室(清华大学),北京100084 [2]清华大学电子工程系,北京100084

出　　处：《纳米技术与精密工程》2013年第2期164-168,共5页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51205223);国家重点实验室基金资助项目(50605040);中国博士后科学基金资助项目(20070420038)

摘　　要：基于悬臂梁的谐振气体传感器可以通过测量悬臂梁谐振频率的偏移而检测相应气体分子.本文介绍了一种使用自激励自检测(SAD)电路驱动单端口多模态微悬臂梁的智能谐振式气体传感器.这种激励模式简化了悬臂梁结构和微加工过程.另外,还可以通过便捷地改变悬臂梁谐振模态实现大量程的气体浓度检测.通过仿真分析了不同模态下悬臂梁的模型和敏感度.通过测量这种基于单端口多模态悬臂梁的气体传感器对于气体的响应情况,展示了这种多模态SAD系统以及其改变模态增加测量量程的功能.A cantilever based resonance gas sensor monitors the resonant frequency shift of the can- tilever in order to detect certain gas molecules. This paper presents a smart resonance gas sensor, in which a multi-mode single-port micro-cantilever is driven by a self-actuating and detecting （SAD） cir- cuit loop. The motivation of the SAD loop simplifies the structure and micro-machining process of the cantilever. Furthermore, it has a smart function to make the resonating cantilever transfer its resonance mode conveniently for a wide detection range. The model and the sensitivity distribution of the micro- cantilever device in different resonance modes are analyzed. The gas response features of the proposed gas sensor, in which the single-port cantilever operated in multi-mode, are also investigated to demonstrate the design of the multi-mode SAD system and smart function of mode switch for wide detection range.

关 键 词：气体传感器 单端口 悬臂梁 多模态 大量程 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]