数字电影反光镜3D扫描面形检测与评价  

Surface inspection and evaluation of ellipsoidal mirror using 3D scanning

作　　者：吕少波[1] 王银河[1] 雷鹏[1] 姚春龙[1] 高鹏[1] 阴晓俊[1] 

机构地区：[1]沈阳仪表科学研究院,辽宁沈阳110043

出　　处：《应用光学》2013年第1期117-122,共6页Journal of Applied Optics

基　　金：国机集团科研院所技术开发研究专项基金(SINOMACH11科90-21)

摘　　要：通过3D扫描的方法,对椭球反光镜的面形进行了检测,并与标准椭球面形进行最佳拟合对比,以E210反光镜为例。结果表明:3D扫描能够完成椭球反光镜的检测,E210反光镜在底孔部位存在加工过量,在端口部位存在近似"十字形"对称的加工不足的现象,加工误差范围为-0.06mm～+0.08mm,符合轮廓度误差±0.1mm的要求。3D扫描点云能够进行逆向反求并建立实际反射面模型,进一步模拟反光镜的反射光斑形状、大小等参数,模拟结果与检测结果一致。By using 3D scanning detection method, we measured the surface of ellipsoidal reflector and performed the best fitting contrast with the standard ellipsoidal suface-taking E210 reflector as an example. The result shows that the 3D scan detection method is capable of ellip-soidal reflector inspection, and the E210 ellipsoidal reflector is processed excessively on the bottom and insufficiently on the top in an approximate shape like ＂cross＂. The processing error is --0. 06 mm; ＋0. 08 mm, which meets the limited profile error range of --0. 1 mm ＋0.1 ram. We carried out the reverse calculation according to the scanned point cloud data and established an actual reflection surface model, moreover, further simulation of reflector parameters, such as reflecting spot shape and size, was accomplished. The simulation results correspond well to the test result.

关 键 词：椭球反光镜 3D扫描 面形偏差 光路模拟 

分 类 号：O483[理学—固体物理] TH74[理学—物理]