真空多弧离子镀制备Ti(CN)涂层及其性能研究  

Preparation of Ti(CN) Coating by Vacuum Arc Ion Plating and Its Properties

作　　者：折洁[1] 张程煜[1] 张贝贝[1] 乔生儒[1] 

机构地区：[1]西北工业大学超高温复合材料国家重点实验室,西安710072

出　　处：《材料导报》2013年第4期12-15,22,共5页Materials Reports

基　　金：国家自然科学基金面上项目(50702045);高等学校博士学科点专项科研基金(20070699007)

摘　　要：采用真空多弧离子镀技术在X12CrMoWVNbN10-1-1耐热钢表面沉积Ti(CN)涂层,研究了涂层的组织和性能,并对涂层的抗热震和抗氧化性进行了研究。结果表明,采用适当的沉积温度、压力及N2流量,可以在X12CrMoWVNbN10-1-1耐热钢表面得到以Ti(CN)为主的致密涂层,在沉积温度400℃时,该涂层的最高硬度可达2438.7HV0.025,涂层在650℃以下具有良好的抗氧化性能,在700℃以下具有良好的抗热震性能。Ti（CN） coating was deposited on X12CrMoWVNbN10-1 1 heat-resistant steel by vacuum multic-arc ion plating. The surface morphology and composition of the coating were studied by scanning electron microscopy, and the thermal shock and oxidation resistance of coating were also studied. The results show that it was got a dense coa- ting of Ti （CN） on X12CrMoWVNbN10-1-1 heat-resistant steel surface, with appropriate deposition temperature, pressure and N2 flow. At the deposition temperature of 400 ℃, the coating hardness rose up to 2438. 7HV0. 025, the coating has good oxidation resistance at 650 ℃ and good thermal shock resistance at 700 ℃.

关 键 词：多弧离子镀 Ti(CN)涂层抗氧化性抗热震性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]