Preparation and properties of organic-inorganic modified SiO_2 thin films  

作　　者：赵贤辉 李长虹 王海 

机构地区：[1]School of Mechanical,Electronic and Control Engineering,Beijing Jiaotong University

出　　处：《Journal of Central South University》2013年第3期608-614,共7页中南大学学报（英文版）

基　　金：supported partly by the School of Mechanical,Electronic and Control Engineering,Beijing Jiaotong university,China

摘　　要：Polydimethylsiloxane （PDMS）, tetraethoxysilane （TEOS）, ethyl alcohol （EtOH） and deionized water were main raw materials to prepare silicone-modified hybrid thin films using sol-gel method. The effect of the contents of H2O and PDMS on thin films was studied. When the volume ratio of H20 to TEOS is 0.5, the optimum quality of thin films is obtained. And the gelation time is affected slightly by H20 content. Uniform thin films are obtained when the volume ratio of PDMS to TEOS is 0.2. Yet, the sol would be inactive in 6 d. Various properties of thin films were studied, including hardness, adhesive quality, hydrophobic property, corrosion protection property, and abrasion resistance. Test results show that the pencil hardness is generally 3-6 H, and adhesive quality achieves the highest standard of 0. When the sintering temperature is below 400℃, the contact angle is about 95° and hydrophobic films are obtained. The abrasion resistance of thin films is better than that of aluminum alloy when the sintering temperature is higher than 300℃. And the excellent corrosion protective effect is obtained by single-layer coating when the sintering temperature is higher than 400℃.Polydimethylsiloxane(PDMS),tetraethoxysilane(TEOS),ethyl alcohol(EtOH) and deionized water were main raw materials to prepare silicone-modified hybrid thin films using sol-gel method.The effect of the contents of H2O and PDMS on thin films was studied.When the volume ratio of H2O to TEOS is 0.5,the optimum quality of thin films is obtained.And the gelation time is affected slightly by H2O content.Uniform thin films are obtained when the volume ratio of PDMS to TEOS is 0.2.Yet,the sol would be inactive in 6 d.Various properties of thin films were studied,including hardness,adhesive quality,hydrophobic property,corrosion protection property,and abrasion resistance.Test results show that the pencil hardness is generally 3-6 H,and adhesive quality achieves the highest standard of 0.When the sintering temperature is below 400 oC,the contact angle is about 95° and hydrophobic films are obtained.The abrasion resistance of thin films is better than that of aluminum alloy when the sintering temperature is higher than 300 oC.And the excellent corrosion protective effect is obtained by single-layer coating when the sintering temperature is higher than 400 oC.

关 键 词：sol-gel method hybrid thin film HARDNESS adhesive quality hydrophobic property CORROSION 

分 类 号：O613.72[理学—无机化学] TB383.2[理学—化学]