椭球反光镜三坐标检测与逆向分析  

Coordinate Measuring Inspection and Inverse Analysis on Ellipsoidal Surface Reflector

作　　者：吕少波[1] 王银河[1] 张勇喜[1] 刘新华[1] 孙朝阳[1] 阴晓俊[1] 

机构地区：[1]沈阳仪表科学研究院,沈阳110043

出　　处：《光电工程》2013年第2期40-45,共6页Opto-Electronic Engineering

基　　金：国机集团科研院所技术开发研究专项基金"数字投影系统新型光学薄膜反光镜"

摘　　要：采用三坐标测量法对磨削加工及模压热成型两种工艺的椭球反光镜进行了面形测量,与标准型线全局比对获得了椭球面形的偏差,结果表明磨削反光镜存在峰谷误差分布,而模压热成型反光镜误差曲线近似于线性分布。采用Tracepro对两种反光镜进行了应用模拟,磨削反光镜的光利用效率是模压热成型反光镜的92%。采用光学成像法观察了反光镜的出射光分布情况,磨削反光镜出射光呈现环状条纹亮暗分布,而模压热成型反光镜出射光呈现云状光强分布。Two ellipsoidal surface reflectors, one was made by grinding and the other by molding, were detected using coordinate measuring machine. Contrasting to their profile line, a deviation distribution curve with peaks and valley on the first reflector and a linear deviation distribution on the other one are acquired. TracePro was used to simulate luminance of their reflecting spot and a reflecting effect ratio of 92% comparing between the two reflectors is obtained. Optical imaging method was used to inspect the reflected light spot and the result shows that bright and dim rings appear alternately in the reflected spot of the grinding reflector, and the other one gets a cloud-like reflected light spot.

关 键 词：椭球反光镜 面形偏差 三坐标测量 光斑模拟 

分 类 号：O483[理学—固体物理]