精密PSD微位移在线测量系统  

Precise PSD Micro-Displacement Online Measurement System

作　　者：宋殿友[1,2,3] 刘铁根[1] 丁小昆[1] 李志宏[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]天津理工大学电信学院,天津300384 [3]薄膜电子与通信器件天津市重点实验室,天津300384

出　　处：《天津大学学报》2013年第2期168-173,共6页Journal of Tianjin University(Science and Technology)

基　　金：国家重点基础研究发展计划(973计划)资助项目(2010CB327802);国家自然科学基金资助项目((60627002;30770597);天津市科技支撑计划资助项目(09ZCKFGX01400);天津市应用基础研究计划资助项目(06YFJZJC00400)

摘　　要：为了满足工业现场微位移测量的精密性实时性和可靠性要求,设计并制作了位置敏感器件(PSD)激光微位移测量系统.系统将调制带通滤波峰值检测等信号处理技术运用于激光三角法中,并利用PSD信号单通道处理方式,提高了系统的抗干扰能力.同时,系统采用自适应控制方法改变激光的调制频率,从而调整电信号的增益系数以适应各种测量对象.实验表明,在没有滤光片的情况下,系统有效地消除了背景光和暗电流的影响,测量频率最高可达2,kHz,分辨率达到0.035%,稳定性误差小于0.090%,线性度好于1.2%,大大降低了温漂的影响.In the industrial field, the online measurement of micro-displacement needs to be precise, real-time and reliable. In order to meet the requirements above, a position sensitive detector （PSD） laser micro-displacement meas- urement system was designed. In the system, many signal processing techniques, including modulation, band-pass filter and peak detection, were applied to laser triangulation method, and the PSD signal was processed in the single- channel way, all of which improved the anti-jamming capability. Meanwhile an adaptive control method was adopted to adjust the PSD signal gain coefficient by changing laser modulation frequency, which made the system suitable for various specific objects. Experimental results indicate that in the absence of filter, the system can effectively elimi- nate the impact of background light with dark current, with measurement frequency up to 2 kHz, resolution up to 0.035%, stability error better than 0.090%, and linearity better than 1.2%. The results also show that the impact of drift has been greatly reduced. Currently, the system has been applied to some online measurement systems.

关 键 词：位置敏感器件 激光三角法 微位移测量 自适应调制 单通道 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]