管座结构设计研究  

Research on Piezoresistive Pressure Sensor Header Structure Design

作　　者：董玉荣[1] 王金文[1] 李宝生[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《仪表技术与传感器》2013年第2期13-15,共3页Instrument Technique and Sensor

摘　　要：通过对含油封装压阻式压力传感器的结构和工作时的受力状态分析,给出了管座的2种失效模式,即密封性差导致的内充液体的泄漏和管座的结构破坏2种模式。在此基础上,设计了几种不同结构的管座形式,并对其优缺点进行了比较。试验结果表明:采取不同的管座结构,可以改善管座各组件的受力状态,从而扩展了压阻式压力传感器的应用场合和使用范围,保证了传感器的长期稳定性和可靠性。Through the oil package piezoresistive pressure sensor structure and work stress analysis, this paper presented the socket two failure modes, namely the seal difference leads to internal filling liquid leakage and socket structure destruction of two models. On this basis, the paper designed several different structures of the base form, and compared their advantages and disadvantages. The test results show that, to adopt different header structures,it can improve the socket assembly stress shapedbody, thereby extending the piezoresistive pressure sensor applications and use, and ensure the long term stability of the sensors and reliability.

关 键 词：压阻式 压力传感器 管座 结构 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]