基于法布里-珀罗干涉仪的微位移测量方法研究  

Research on Measurement Method of Micro-displacement Based on Fabry-Perot Interferometer

作　　者：段小艳[1] 任冬梅[1] 朱振宇[1] 李华丰[1] 兰一兵[1] 

机构地区：[1]中航工业北京长城计量测试技术研究所,北京100095

出　　处：《计测技术》2013年第1期23-25,共3页Metrology & Measurement Technology

基　　金：国家"十一五"技术基础计量科研项目资助(J052010C001)

摘　　要：介绍了一种基于法布里-珀罗干涉仪的微位移测量方法,通过将位移测量转化为频率变化量的测量,实现了亚纳米级测量分辨力。建立了基于法布里-珀罗干涉仪的微位移测量实验装置,完成了320 nm范围内的位移测量,并将测量结果与精密电容传感器的测量结果进行了比较。A micro-displacement measurement method based on Fabry-Perot interferometer is introduced.As the displacement is measured according to the frequency change of a tunable laser,a resolution of sub-nanometer level is achieved.A displacement measurement system is designed and established.The displacements in the range of 320 nm are measured and the results are compared with the measurements of a capacitance transducer.

关 键 词：微位移测量 法布里-珀罗干涉仪 亚纳米分辨力 频率追踪 

分 类 号：TB921[一般工业技术—计量学] TH744.3[机械工程—测试计量技术及仪器]