氧氩比对铒镱掺杂氧化锌薄膜的结构和光波导特性的影响  

Influence of the oxygen/argon ratio on the structure and optical waveguide of Er^(3+)/Yb^(3+) doped ZnO films

作　　者：宋红莲[1] 王凤翔[1] 陈志华[1] 孙舒宁[1] 

机构地区：[1]山东建筑大学理学院,山东济南250101

出　　处：《山东建筑大学学报》2013年第1期42-45,共4页Journal of Shandong Jianzhu University

基　　金：济南市科技局高校院所自主创新计划项目(OUT-02400)

摘　　要：氧化锌作为一种良好的发光材料广泛应用于太阳能电池、气敏传感器、紫外探测器、光电器件、透明电极等诸多领域。文章应用磁控溅射技术制备铒镱掺杂的氧化锌薄膜,利用X射线(XRD)和棱镜耦合技术,分析研究了氧氩比对铒镱掺杂的氧化锌薄膜的结构和光波导特性的影响。结果表明:氧氩比对薄膜的结构和光波导特性有重要影响,当氧氩比为2:16时,薄膜的衍射峰的强度较大,半高宽(FWHM)较窄,有效折射率接近ZnO薄膜的折射率,降低氧氩比有利于增强薄膜的c轴择优取向。ZnO, a luminescent material, is widely used in solar cell, gas sensors, photoelectric devices and transparent electrodes, etc. The Er3＋/Yb3＋ doped ZnO thin film has been fabricated by using radio frequency magnetron sputtering technology and its structural and optical properties are characterized by XRD and prism coupler. The influence is studied of various oxygen/argon ratios on the structure and optical waveguide of Er3＋/Yb3＋ doped ZnO thin films. Results show that the oxygen/argon ratio has a significant effect on the structure and optical waveguide of Er3＋/Yb3＋ doped ZnO films. The strong diffraction peak with a narrow FWHM and the effective refractive index of films are close to ZnO films when the oxygen/argon ratio with the decrease of oxygen/argon ratio. is 2/16. The film along C direction is enhanced

关 键 词：磁控溅射技术 铒镱掺杂氧化锌 氧氩比 石英 蓝宝石 

分 类 号：TN304.21[电子电信—物理电子学]