高亮度金刚石薄膜场发射荧光管的制作  

The Implementation of High Brightness Field Emission Display of Globe-like Diamond Microcrystalline-aggregate Films

作　　者：高金海[1] 李桢[1] 张武勤[1] 张兵临[2] 

机构地区：[1]郑州师范学院物理系,郑州450044 [2]郑州大学物理工程学院材料物理教育部重点实验室,郑州450052

出　　处：《光电子技术》2013年第1期1-4,共4页Optoelectronic Technology

基　　金：国家教育重点项目资助(205091);河南省高等学校青年骨干教师资助计划项目(教高[2011]550号)

摘　　要：利用微波等离子化学气相沉积法,制备出类球状微米金刚石聚晶薄膜作为场发射阴极材料。通过采用低熔点玻璃粉烧结工艺,从器件封装、器件烧结、器件排气和器件烤消等方面进行了探索和创新,实现了场致发射荧光管的高真空封装。综合采用这套技术,已经研发出的真空场致发射荧光管,在5.45V/μm电场下,光的亮度达到了11 000cd/m2。为将来设计制作矩阵寻址场发射平板显示器件奠定了基础。Field emission display is a new vacuum flat panel display device. The globe-like di-amond microcrystalline-aggregates, as a field emission cathode, were fabricated by microwave plasma chemical vapor deposition（MPCVD）. Through the use of low temperature melting glass powder sintering process,and innovations in the device package, sintering, consuming such as ex- haust and baking exploration, the field emission display of high vacuum package is implemented. Integrated use of this technology has led to a secondary structure, three-pole structure of the field emission display,obtained in 5.45 V/μm field, and the light intensity of the samples reached 11 000 cd/m^2 This consolidates a strong base for the future design of field emission flat panel dis-play of matrix addressing.

关 键 词：场致发射荧光管 类球状微米金刚石聚晶薄膜 封装 

分 类 号：TB383[一般工业技术—材料科学与工程] O484[理学—固体物理]