基于SU-8的高质量平面微透镜阵列压印新方法  

New Method of Imprinting High Performance Plane Microlens Arrays Based on SU-8

作　　者：范新磊[1,2] 张斌珍[1,2] 李向红[1,2] 张勇[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室 [2]仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2013年第4期242-247,共6页Micronanoelectronic Technology

基　　金：国家重点基础研究发展计划资助项目(2012CB723401)

摘　　要：提出一种采用紫外光刻工艺及压印快速制造平面微透镜阵列的新技术。首先采用光刻工艺制作出平面圆柱形阵列,然后用热熔法将圆柱形阵列转化为微透镜阵列。以此微透镜阵列为母板,通过聚二甲基硅氧烷(PDMS)复制出和母板相反的模具,利用毛细效应,以SU-8为结构材料,通过特殊的压印方法得到平面微透镜阵列,可用于平面仿生复眼以及晶椎的最后制作。经过测试微透镜阵列的表面形貌和成像结果,可发现制备后的微透镜阵列聚光性能良好、光强均匀、无气泡和表面形貌均匀,解决了传统方法制作气泡多、表面形貌差的缺点。基于此方法加工的平面微透镜阵列对光学仿生复眼的进一步研究提供了有益参考。A new method was presented to fabricate the plane microlens arrays rapidly by UV light photolithography process and hot embossing. Firstly, the plane cylindrical array was fabri- cated by the lithography technology, and then changed to the microlens arrays through the ther- mal reflow technology. With the microlens arrays as the motherboard, the mould contrary to the motherboard was duplicated by the polydimethylsiloxane （PDMS）. Using the capillary effect, the plane mierolens arrays were obtained with the SU - 8 as the structure material through the special imprint technology. The plane microlens arrays can be used for fabricating the plane bio- nic compound eye and crystalline cone. Through testing the surface morphology and imaging re- sult of the microlens arrays, it is found that the microlens arrays have the advantages of the good condenser performance, uniform light intensity, no bubbles and uniform surface morphology. The disadvantages of many bubbles, poor surface morphology for the traditional method were solved. The microlens arrays fabricated with the machining method provides a useful reference for thefurther study of the optical bionic compound eye.

关 键 词：仿生复眼 压印 热熔 聚二甲基硅氧烷(PDMS) 微透镜阵列 

分 类 号：TN305.7[电子电信—物理电子学]