电弧增强磁控溅射制备的纳米复合Si-C-N超硬薄膜的结构与性能  

Microstructure and Friction and Wear Behavior of Si-C-N Nanocomposite Ultrahard Film Prepared by Arc Enhanced Magnetron Sputtering

作　　者：郑凤新 

机构地区：[1]济宁技师学院机械工程系,山东济宁272013

出　　处：《材料保护》2013年第3期55-57,1-2,共3页Materials Protection

摘　　要：耐磨、韧性好的超硬薄膜工程应用价值大。采用电弧增强磁控溅射(AEMS)技术在GCr15轴承钢表面制备了纳米复合Si-C-N超硬薄膜,研究了薄膜的形貌、相组成、硬度、韧性和摩擦磨损性能。结果表明:薄膜中纳米SiC与Si3N4晶体弥散分布于C-C,C=C以及N-C组成的非晶相基体中,形成了纳米晶/非晶复合组织结构,显著提高了薄膜的硬度和韧性,增强了薄膜的抗摩擦磨损性能;薄膜的硬度为(36.5±3.9)GPa,断裂韧性为(4.15±0.28)MPa.m1/2,稳定摩擦系数为0.27左右。Si-C-N nanocomposite ultrahard film was prepared on the surface of GCr15 steel by arc enhanced magnetron sputtering. The microstructure and phase composition of as-obtained Si-C-N nanocomposite ultrahard film were analyzed, and its hardness, toughness, and friction and wear behavior were examined. It was found that nanocrystalline SiC and Si3N4 of as-prepared nanocomposite film were dispersive distribution in the amorphous matrix containing C-C, C=C and N-C, thereby significantly increasing the hardness, toughness and wear resistance of the composite film. Namely, As-prepared Si-C-N nanocomposite ultrahard film had a microhardness of (36.5±3.9) GPa, a fracture toughness of (4.15±0.28) MPa·m1/2, and a steady-state friction coefficient of 0.27.

关 键 词：AEMS 纳米复合Si-C-N超硬薄膜 显微结构 硬度 断裂韧性 摩擦系数 

分 类 号：TB383.2[一般工业技术—材料科学与工程]