A trapezoidal cantilever density sensor based on MEMS technology  

作　　者：Li-bo ZHAO Long-qi XU Gui-ming ZHANG Yu-long ZHAO Xiao-po WANG Zhi-gang LIU Zhuang-de JIANG 

机构地区：[1]State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University [2]MOE Key Laboratory of Thermo-Fluid Science and Engineering,Xi'an Jiaotong University

出　　处：《Journal of Zhejiang University-Science C(Computers and Electronics)》2013年第4期274-278,共5页浙江大学学报C辑（计算机与电子（英文版）

基　　金：Project supported by the National Natural Science Foundation of China (Nos. 50836004,50905139,and 90923001);the Fundamental Research Funds for the Central Universities (No. xjj20100140);the Science and Technology Research Project of Shaanxi Province (No. 2012KJXX-01);the Program of Changjiang Scholars and Innovative Research Team in University (No. IRT1033);the 111 Program (No. B12016),China

摘　　要：A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems （MEMS） technology. The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever im-mersed in the fluid. To improve the sensitivity of the sensor, the modal and harmonic response analyses of trapezoidal and rec-tangular cantilevers are simulated by ANSYS software. The higher the resonant frequency of the cantilever immersed in the fluid, the higher the sensitivity of the sensor; the higher the resonant strain value, the easier the detection of the output signal of the sensor. Based on the results of simulation, the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 ℃ and 26 cantilever density sensor has a good performance. to 34 ℃, respectively. Experimental results show that the trapezoidal cantilever density sensor has a good pertbrmance.A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems(MEMS) technology.The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever immersed in the fluid.To improve the sensitivity of the sensor,the modal and harmonic response analyses of trapezoidal and rectangular cantilevers are simulated by ANSYS software.The higher the resonant frequency of the cantilever immersed in the fluid,the higher the sensitivity of the sensor;the higher the resonant strain value,the easier the detection of the output signal of the sensor.Based on the results of simulation,the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 ℃ and 26 to 34 ℃,respectively.Experimental results show that the trapezoidal cantilever density sensor has a good performance.

关 键 词：Micro-electro-mechanical systems （MEMS） Density sensor Trapezoidal cantilever Resonant frequency 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TS243.8[自动化与计算机技术—控制科学与工程]