微结构光学零件的大气等离子体数控加工  

Numerically controlled atmospheric pressure plasma processing of micro-structured optics

作　　者：李娜[1] 王波[1] 金会良[1] 袁野[1] 杨允利[1] 

机构地区：[1]哈尔滨工业大学机电工程学院,黑龙江哈尔滨150001

出　　处：《光学精密工程》2013年第4期934-940,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51175123)

摘　　要：为了实现对微结构光学零件无表面损伤和亚表面损伤的高效加工,建立了大气等离子体数控加工系统。研究了该系统的平台设计、大气等离子体加工工艺特性及其数控加工过程。首先,根据大气等离子体加工的原理及要求介绍了该数控加工系统的组成。然后,以He/SF6/O2加工熔融石英为例,采用针状电极等离子体矩对系统加工工艺的可控性以及多参数工艺特性进行了探索,并根据工艺实验结果拟合出该加工条件下的去除函数。最后,介绍了整个大气等离子体数控加工的实现过程。实验结果表明:利用该系统可以在平面融石英材料上加工出幅值为150nm、波长为6mm的正弦网格结构,由此验证了该数控加工系统的可行性,实现了对复杂面型光学零件表面的确定性加工。To process micro-structured surface optical elements without surface damage and subsurface damage in higher efficiency, a numerical control system for Atmospheric Pressure Plasma Processing （APPP） was established. The design of a system platform, APPP process characteristics and numeri- cal control process were investigated. First, according to the principle and requirements of the APPP, the numerical control system composition was presented. Then, by taking the processing of {used sili- ca by He/SF6/O2 as an example, the controllability of the process as well as multi-parameter process characteristics were explored using the plasma torch with a needle electrode, and the removal function under this condition was fitted. Finally, the entire realization process of the numerical control machi- ning {or the APPP was proposed. Experimental results indicate that the sine structure with an ampli- tude of 150 nm and wavelength of 6 mm can be processed on a flat fused silica surface by this system, which verifies the feasibility of the numerical control system and achieves the deterministic processing of complex optical surfaces.

关 键 词：微结构光学零件 大气等离子体加工 去除深度 数控加工系统 

分 类 号：TN305.2[电子电信—物理电子学] TG659[金属学及工艺—金属切削加工及机床]