多线切割机轴辊温度智能控制  

The Temperature Intelligent Control of Multi-wire Saw's Roller

作　　者：张为强[1] 朱林涛[1] 李亚光 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176 [2]有研半导体材料股份有限公司,北京100088

出　　处：《电子工业专用设备》2013年第4期15-18,54,共5页Equipment for Electronic Products Manufacturing

基　　金：国家02科技重大专项中硅材料设备应用工程(2009ZX02011-002A)

摘　　要：多线切割机轴辊温度对于硅片表面质量,尤其是翘曲度有较大的影响。传统的PID控制方法由于其局限性难以满足实际生产的要求。提出一种智能PID温度控制方案,模拟人的控制策略及方法,结合经典PID方案进行轴辊温度控制。该方法简单有效、工作可靠,满足半导体用多线切割机的要求,并在实际工作中成功应用。The roller＇s temperature of Multi-wire Saw has a large impact on the silicon chip, especially warp. It is difficult to meet the actual requirements of production for traditional PID because of its limitations. This paper provides an intelligent PID program, which simulates the behavior of human combining with classic PID to control the roller＇s temperature. The method is simple and effective .It works reliable to meet the requirement of Multi-wire Saw for IC.It runs well in practical application.

关 键 词：多线切割机 轴辊温度控制 智能PID 

分 类 号：TN305[电子电信—物理电子学]