Ti_5Si_3的研究进展  

Research Progress of Ti_5Si_3

作　　者：杜军[1] 肖昭强[1] 李不悔[1] 吴其[1] 刘娇[1] 

机构地区：[1]南昌大学环境与化学工程学院,江西南昌330031

出　　处：《南昌大学学报（工科版）》2013年第1期12-16,共5页Journal of Nanchang University(Engineering & Technology)

基　　金：国家自然科学基金资助项目(51162022;21201098);南昌大学测试基金资助项目(2012019)

摘　　要：概述了Ti5Si3的物理结构和化学性质,展现出其熔点高、密度低、电阻率低、硬度高、高温强度大、抗高温氧化性能好和化学性质稳定等性质。对Ti5Si3合金材料及其薄膜的固固、固液、固气和气气反应制备工艺及其优缺点进行了较为系统的阐述。并结合Ti5Si3的优良性能,对其在高温结构材料、镀膜材料、电子器件、微电极和微传感器材料领域的应用进行了重点介绍。Ti5Si3 had been widely used as high temperature structural materials in aerospace fields. This review gives an overview of the scientific and technological aspects of of Ti5Si3 including the properties and structure of Ti5Si3 ,preparation techniques and its applications. The solid-solid, solid-liquid, solid-gas and gas-gas preparation methods of Ti5 Si3 thin films and alloy were systematically described. Combining with the low resistivity, excellent oxidation resistant and high-temperature stability, its applications in high-temperature structual materials, thin films, electronic components and microsensors were discussed.

关 键 词：无机非金属材料 TI5SI3 综述 制备方法 应用 

分 类 号：TQ134.11[化学工程—无机化工] TQ127.2