Echelle dif fraction grating based high-resolution spectrometer-on-chip on SiON waveguide platform  

作　　者：马骁 何建军 李明宇 

机构地区：[1]State Key Laboratory of Modern Optical Instrumentation, Zhejiang University

出　　处：《Chinese Optics Letters》2013年第3期69-72,共4页中国光学快报（英文版）

基　　金：supported by the Zhejiang Provincial Natural Science Foundation of China(No.Y1090239);the National "863" Program of China(No.2011AA010305);the Fundamental Research Funds for the Central Universities of China(Nos.2012QNA5015 and 2012QNA5039)

摘　　要：An echelle diffraction grating based high-resolution spectrometer-on-chip on silicon oxynitride （SiON） waveguide platform operated at a wavelength range of 850 nm is demonstrated. The chip comprises 120 output waveguides with 0.25-nm wavelength channel spacing and has a size of only 11 - 6 （mm）. The experimental results show that the insertion loss is -14 dB, the measured adjacent channel crosstalk is less than -25 dB, the 3 dB channel bandwidth is 〈 0.1 nm, and the channel non-uniformity is 3 dB for 56 channels with a wavelength ranging from 838 to 852 nm.An echelle diffraction grating based high-resolution spectrometer-on-chip on silicon oxynitride （SiON） waveguide platform operated at a wavelength range of 850 nm is demonstrated. The chip comprises 120 output waveguides with 0.25-nm wavelength channel spacing and has a size of only 11 - 6 （mm）. The experimental results show that the insertion loss is -14 dB, the measured adjacent channel crosstalk is less than -25 dB, the 3 dB channel bandwidth is 〈 0.1 nm, and the channel non-uniformity is 3 dB for 56 channels with a wavelength ranging from 838 to 852 nm.

关 键 词：Diffraction Silicon nitride SPECTROMETERS Waveguides 

分 类 号：TN814[电子电信—信息与通信工程]