基于响应曲面法的激光透射连接硅与玻璃的工艺研究  

Process Study on Laser Transmission Bonding of Silicon with Glass via Response Surface Methodology

作　　者：薛国春[1] 刘会霞[1] 李品[1] 蒋涛[1] 高阳阳[1] 严长[1] 王霄[1] 

机构地区：[1]江苏大学机械工程学院,江苏镇江212013

出　　处：《中国激光》2013年第3期76-85,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金(51275219);江苏省光子制造科学与技术重点实验室开放基金(GZ201105)资助课题

摘　　要：采用Nd…YAG脉冲激光器对硅与玻璃进行激光透射连接实验。阐述了激光透射连接硅与玻璃的连接机理。采用旋转中心复合设计进行实验规划,使用响应曲面法(RSM)建立了激光透射连接工艺参数与剪切强度、熔池宽度的数学模型,进行了方差分析、实验模型的验证,讨论了激光透射连接工艺参数对剪切强度、熔池宽度的交互影响趋势,运用满意度函数对工艺参数进行优化,并对优化结果进行验证。结果表明,所建立的模型能够较好地反映各响应与工艺参数之间的关系,优化的预测结果与验证实验的结果较为吻合,对提高连接质量和降低生产成本具有很好的指导意义。A study on transmission laser bonding of silicon with glass by Nd： YAG pulse laser is conducted. The mechanism of transmission laser bonding of silicon with glass is expounded. Combined with a central composite rotatable experimental design, response surface methodology （RSM） is employed to establish mathematical models of relationships among various welding process parameters and lap-shear strength as well as bond width. Then the analysis of variance is checked and these mathematical models are validated. Effects of different bonding parameters on lap-shear strength and bond width are discussed. Based on this, desirability function is introduced to optimize the parameters of the bonding process and the result of optimal experiments is verified. The results obtained indicate that the developed mathematical models can be used to show the relationship between responses and parameters. Predicted results of parameters optimization developed by desirability function are consistent with experimental results. Therefore, this study provides an effective direction to enhance the bond quality and minimize the bond cost.

关 键 词：激光技术 激光透射连接 响应曲面法 硅 玻璃 工艺参数优化 

分 类 号：TG456.7[金属学及工艺—焊接]