THz焦平面探测器及其成像技术发展综述  

Review of THz Focal Plane Detector and the Development of Its Imaging Technology

作　　者：金伟其[1] 田莉[1] 王宏臣 蔡毅[1] 王鹏 

机构地区：[1]北京理工大学光电学院光电成像技术与系统教育部重点实验室,北京100081 [2]烟台睿创微纳技术有限公司,山东烟台26400

出　　处：《红外技术》2013年第4期187-194,共8页Infrared Technology

基　　金：国家自然科学基金重点项目;编号:61231014

摘　　要：THz探测器作为THz成像系统的核心器件,一定程度上制约着THz成像技术的发展,鉴于单元/多元探测器的光机扫描成像模式存在的问题,THz焦平面探测器成像成为THz探测技术发展的方向。介绍了近年来国内外在THz焦平面探测器,特别是基于VOx的THz焦平面探测器及其成像技术的研究进展,分析了THz焦平面探测器及其成像模式的发展前景。本文对于研究THz成像技术及应用的发展具有重要的参考意义。As the core device of the THz imaging system, the development of THz detectors restricts the development of YHz imaging technology. Because there are many problems in the unit/multiple-detector optical mechanical scanning imaging mode, THz focal plane array （FPA） detector imaging becomes the development direction of the THz detection technology. This article describes the research advances of the THz focal plane array detectors especially the THz focal plane array detector which based on the VO, uncooled FPA and its imaging technology both at home and abroad in recent years. This paper also analyzes the development prospects of the THz focal plane detector and its imaging mode, the paper has reference significance to the research of the development and application of THz imaging technology.

关 键 词：THz成像 THz探测器 焦平面 VOx非制冷探测器 热释电非制冷探测器 

分 类 号：TN224[电子电信—物理电子学]