带驻留约束及双臂机械手的集束型设备群调度算法  

Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints

作　　者：石潇铭[1] 周炳海[1] 

机构地区：[1]同济大学机械与能源工程学院,上海201804

出　　处：《上海交通大学学报》2013年第4期650-655,共6页Journal of Shanghai Jiaotong University

基　　金：国家自然科学基金资助项目(71071115)

摘　　要：根据集束型设备群的特点,对调度问题域进行描述,并提出了带驻留约束的双臂集束型设备群调度算法.该算法利用分解方法将集束型设备群分解为多个单集束型设备,并在此基础上提出一种基于机械手无冲突约束的搜索调度算法,调度目标是使到达晶圆在最短基本周期内完成加工.仿真实验分析结果表明,用所提出的算法进行集束型设备群的晶圆处理是有效的.According to characteristics of the cluster tools, a problem domain of the scheduling was sup posed and defined, and a scheduling algorithm of dual-arm muti-cluster tools with residence constraints was presented as well. A decomposition method is utilized to this algorithm to break multi-cluster tools into several independent single-cluster ones, meanwhile, a free-conflict constraint scheduling algorithm is presented with an objective of minimizing the fundamental period of the current wafers. Simulated experiments were designed to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid to schedule the wafers on the multi cluster tools.

关 键 词：集束型设备群 驻留约束 分解 调度 仿真实验 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]