双干涉式微位移测量系统的研究与性能改善  

Study on Dual-Interferometer and Implement of System Character for Measuring Micro Distance

作　　者：李志全[1] 吴朝霞[1] 唐旭晖[1] 

机构地区：[1]燕山大学电气工程学院,秦皇岛066004

出　　处：《传感技术学报》2000年第3期216-219,共4页Chinese Journal of Sensors and Actuators

摘　　要：本文提出的光扫描光纤传输双 Fabry- Perot干涉系统用于测量绝对为微位移 ,该系统把扫描波长作为内部转换参数 ,采用参考长度与敏感头间隙长度比较 ,从而得到绝对测量值 .An optical scanning, fiber dual extrinsic Fabry Perot interferometer (DEFPI) s ystem for measuring small distance absolutely has been developed in this paper. Taking the scanning wavelength as an inter converter to compare the gap length, we may obtain an absolute measurement value.

关 键 词：光纤传感器 光纤干涉仪 微位移测量 性能 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]